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发明名称
Sensorchip-Bruchfestigkeits-Inspektionsvorrichtung sowie Verfahren zur Inspektion der Bruchfestigkeit eines Sensorchips
摘要
申请公布号
DE102006025992(B4)
申请公布日期
2011.02.10
申请号
DE200610025992
申请日期
2006.06.02
申请人
MITSUBISHI DENKI K.K.
发明人
YABE, HIDEKI;SAKAI, YUICHI;KAWAMA, YOSHITATSU;KUMAGAI, MUNEHITO;NAKAOKA, YASUYUKI
分类号
G01M99/00;G01N3/30;G01M7/08;H01L21/66
主分类号
G01M99/00
代理机构
代理人
主权项
地址
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