| 摘要 |
PROBLEM TO BE SOLVED: To successfully carry out the application of a liquid. SOLUTION: In the coating apparatus 100, the transmittance of a liquid 120 in a nozzle head 106 is detected by a transmittance detecting part 60 provided on the nozzle head 106 and the size and the quantity of bubbles stagnating in the nozzle head 106 are determined based on the value of the light transmittance. Further in the coating apparatus 100, because the bubbles stagnating in the nozzle head 106 are removed by moving the nozzle head 106 to a waiting position before the discharge of the liquid 120 from the nozzle head 106 is made impossible after the value of light transmittance detected by the transmittance detecting part 60 exceeds a first permissible value or a second permissible value, a trouble that the application of the liquid 120 is interrupted because the bubbles are excessively accumulated in the nozzle head 106 is suppressed to enable suitable application of the liquid 120. COPYRIGHT: (C)2011,JPO&INPIT |
