| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology which improves image quality of a confocal microscope. SOLUTION: A deflection surface 25A of an optical deflecting element 25, on which a plurality of micromirrors are provided, of the confocal microscope 1 is disposed at a position conjugate to a prescribed observation surface of a sample S, and the optical deflecting element 25 controls the deflection directions of an observation light emitted from the sample S, focused with an objective lens 29 and made incident on the deflecting surface 25A by a micromirror. A control section 41 successively selects the micromirrors of the optical deflection element and controls, so as to deflect the observation light incident on the selected micromirror toward an imaging lens 24. The observation light deflected in the imaging lens 24 direction is focused on the light-receiving face 31A of a detector 31 with the imaging lens 24. The planes extending from the deflecting face 25A of the optical deflecting element 25, the primary flat face 24A of the imaging lens 24 and the light-receiving face 31A of the detector 31, respectively, intersect a line which passes through a point A1. The present invention is applicable to confocal microscopes, for example. COPYRIGHT: (C)2011,JPO&INPIT
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