| 摘要 |
<P>PROBLEM TO BE SOLVED: To stably and highly accurately measure the surface shape of a measurement target surface having steps formed thereon and to reduce the measurement time. <P>SOLUTION: In step S101, a first probe is allowed to scan a measurement target surface to obtian measurement data including three-dimensional position data by the first probe. In step S102, step position data indicating the positions of steps on the measurement target surface is computed based on the measurement data obtained in step S101. In step S103, scanning conditions of a second probe, capable of measurement with higher resolution than that of the first probe, are determined according to the position of the measurement target surface, based on the step position data obtained in step S102. In step S104, the second probe is allowed to scan the measurement target surface under the scanning conditions determined in step S103 to obtain measurement data, including three-dimensional position data by the second probe. In step S105, surface shape data indicating the surface shape of the measurement target surface is determined by computation, based on the measurement data obtained in step S104. <P>COPYRIGHT: (C)2011,JPO&INPIT |
