发明名称 |
METHOD AND APPARATUS FOR WIRELESS TRANSMISSION OF DIAGNOSTIC INFORMATION |
摘要 |
The present disclosure provides a system for fabricating a semiconductor device. The system includes a semiconductor fabrication tool. The semiconductor fabrication tool has an integrated inter interface that measures a first process parameter of the fabrication tool. The system also includes a wireless sensor. The wireless sensor is detachably coupled to the fabrication tool. The wireless sensor measures a second process parameter of the fabrication tool. The second process parameter is different from the first process parameter.
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申请公布号 |
US2011035043(A1) |
申请公布日期 |
2011.02.10 |
申请号 |
US20090615936 |
申请日期 |
2009.11.10 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
LIU HSU-SHUI;PAI JIUN-RONG;WANG YEH-CHIEH |
分类号 |
G06F17/00 |
主分类号 |
G06F17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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