| 摘要 |
PURPOSE: An electronic pressure switch and a method for manufacturing the same are provided to minimize the entire size of the switch by being formed into one chip or a module. CONSTITUTION: A first resistance(R2) is in connection with a micro-electronic-mechanical-systems(MEMS) variable resistance(R1). A first switch(TR1) includes a control electrode which is in connection with a node between the MEMS variable resistance and the first resistance. A second resistance(R3) is in connection with the first switch. A second switch(TR2) is in connection with a node between the first switch and the second resistance. The MEMS variable resistance is formed in a diaphragm with a thin thickness. The first resistance, the second resistance, the first switch, and the second switch are formed in a body with a thick thickness.
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