发明名称 LASER CVD METHOD
摘要 PURPOSE:To promote reaction by enhancing the activity in a reaction region, by generating photochemical gaseous phase precipitation reaction by irradiating the raw material gases introduced into a hermetically closed container with a plurality of laser beams having the same wavelength. CONSTITUTION:When a powder of a reaction product is to be obtained, first laser beam 4 and second laser beam 4a are directed in parallel to each other at first. Raw material gases are injected at a right angle to the laser beams 4, 4a through a nozzle 2. Therefore, the reflecting region 10 of the raw material gases is formed by the irradiation with the first laser beam 4, and further irradiated wit the second laser beam 4a to accelerate the reaction of the gases. The powder of the reaction product obtained by this method is collected by the filter provided to a gas exhaust port 8.
申请公布号 JPS6351940(A) 申请公布日期 1988.03.05
申请号 JP19860194068 申请日期 1986.08.21
申请人 NIPPON KOKAN KK <NKK> 发明人 NAKADA KIYOKAZU;ONO MORIAKI;KOSUGE SHIGECHIKA;WATANABE ITARU
分类号 B01J12/02;B01J19/12;C23C16/32;C23C16/34;C23C16/48 主分类号 B01J12/02
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