| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe which can accurately and easily perform alignment, and to provide a probe card. SOLUTION: The probe 1 having a three-layered structure wherein each outer layer is arranged on both sides of a middle layer, is constituted of a mounting part 2 having a front side end 7 and a rear side end 8, an arm part 3 extending from the rear side to the front side of the mounting part, and a tip part 4 provided in a vertical direction from the tip of the arm part. The tip part 4 includes a contact part 11 projecting to the vertical direction, an alignment mark base part 14 provided on the furthermore rear side than the contact part, and an alignment mark 13. The alignment mark 13 includes a first projection part and a second projection part projecting to the same direction as the contact part from an inclined surface of the alignment mark base part 14. COPYRIGHT: (C)2011,JPO&INPIT |
