发明名称 Nanomesh SRAM Cell
摘要 Nanowire-based devices are provided. In one aspect, a SRAM cell includes at least one pair of pass gates and at least one pair of inverters formed adjacent to one another on a wafer. Each pass gate includes one or more device layers each having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region and a gate common to each of the pass gate device layers surrounding the nanowire channels. Each inverter includes a plurality of device layers each having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region and a gate common to each of the inverter device layers surrounding the nanowire channels.
申请公布号 US2011031473(A1) 申请公布日期 2011.02.10
申请号 US20090536741 申请日期 2009.08.06
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHANG JOSEPHINE;CHANG PAUL;GUILLORN MICHAEL A.;SLEIGHT JEFFREY
分类号 H01L27/11;H01L21/8239;H01L29/66 主分类号 H01L27/11
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