NONDESTRUCTIVE ANALYSIS FOR PERIODIC STRUCTURE

摘要

PURPOSE: A non-destructive inspection method on a periodic structure is provided to enable the micro structure of an oxide film or a coated layer, which is naturally formed on a periodic structure, to be precisely inspected. CONSTITUTION: A non-destructive inspection method on a periodic structure is as follows. A beam is radiated from a light source to an actual periodic structure and physical values for the reflectivity or the transmittance of the beam are measured(S10). Physical values for the reflectivity or the transmittance when the beam enters a virtual periodic structure are calculated(S30). A virtual periodic structure with a 1D, 2D or 3D repetitive shape is established. The virtual periodic structure is horizontally split into N layers. The virtual periodic structure is established by a 0D periodic structure and another periodic structure, which is formed by geometrical or physical perturbation of the 0D periodic structure.