| 摘要 |
<p>An inspection device is able, for example, to inspect reflectances of mirror elements of a spatial light modulator arranged in an optical path of an illumination optical system, on an as-needed basis. The inspection device (10) is configured to inspect a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually. The inspection device is provided with a conjugate optical system (11, 12) which is arranged optically downstream the spatial light modulator and which forms a conjugate plane optically conjugate with an array plane where the plurality of optical elements are arrayed; a photodetector (13) having a detection surface arranged on or near the conjugate plane; and an inspection unit (14) which inspects optical characteristics of the optical elements, based on the result of detection by the photodetector.</p> |
