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发明名称
PROCESS FOR PRODUCING SILICON NITRIDE OF HIGH ALPHA CONTENT
摘要
申请公布号
EP0186497(B1)
申请公布日期
1992.02.26
申请号
EP19850309420
申请日期
1985.12.23
申请人
ONODA CEMENT COMPANY, LTD.
发明人
KATO, HAJIME;TSUTSUMI, TAKESHI;NITTA, KOUJI;MIURA, EIICHI
分类号
C01B21/068;C04B35/591
主分类号
C01B21/068
代理机构
代理人
主权项
地址
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