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发明名称
摘要
申请公布号
JP4629674(B2)
申请公布日期
2011.02.09
申请号
JP20060525358
申请日期
2004.08.20
申请人
发明人
分类号
H01L21/28;H01L21/336;H01L21/8238;H01L27/08;H01L27/092;H01L29/423;H01L29/49;H01L29/78;H01L29/786
主分类号
H01L21/28
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代理人
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地址
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