AN APPARATUS FOR CONTROL ANNEALING OF SEMICONDUCTORS AND A METHOD THEREOF

摘要

PURPOSE: Thermal processing apparatus and method for a semiconductor is provided to secure an optimized thermal processing condition regardless of the change of the condition by monitoring the state of a nitride based semiconductor in real time. CONSTITUTION: Laser light source(420) emits light. Optical fiber with a dual structure induces light emitted from a heat processing target according to incident light. One end of the optical fiber is a tip. Another end of the optical fiber with the dual structure is in connection with the laser light source and an optical detector(430). The optical detector detects the intensity of the induced light. A controller(440) monitors the intensity of light emitted to the optical detector. The controller controls a lamp to be stopped according to the light emitted to the optical detector.