| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a patterned magnetic recording medium (DTR medium and BPM) which secures satisfactory head flying property by suppressing surface roughness of the medium. SOLUTION: The method of manufacturing a magnetic recording medium comprises: forming a first hard mask including carbon, a second hard mask including Si, Cu, etc., and a resist, on a magnetic recording layer; imprinting a stamper to the resist to transfer a concavo-convex pattern thereto; etching the second hard mask with the patterned resist as a mask to transfer the concavo-convex pattern; etching the first hard mask with the second hard mask as a mask to transfer the concavo-convex pattern; removing the second hard mask remaining in the protrusions of the first hard mask; removing a contaminating layer on the surface of the mask by a mixed gas of an oxygen gas and a fluorine-based gas; patterning the magnetic recording layer; and removing the first hard mask. COPYRIGHT: (C)2011,JPO&INPIT
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