| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten an unnecessary wait time and a total processing time of a data processing section while alleviating an increase in total memory capacity needed for data processing in the data processing section. <P>SOLUTION: A charged particle beam drawing apparatus 10 which draws a pattern on a sample M with a charged particle beam 10a1b: divides cells of size larger than a first threshold included in drawing data D1 into a plurality of cells of size equal to or smaller than the first threshold; redefines cells having data amounts larger than a second threshold among the cells of size equal to or smaller than the first threshold as the cells including a plurality of figures of an array type and the cells including a plurality of figures of a non-array type; divides cells of size larger than a third threshold into a plurality of cells of size equal to or smaller than the third threshold among cells including a plurality of figures of the non-array type; and allocates a plurality of cells after those processings to a plurality of data processing sections 10b1e1, ..., to perform data processing on the plurality of cells in parallel. <P>COPYRIGHT: (C)2011,JPO&INPIT |
