| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card which is easy to manufacture and has an accurate probe position. SOLUTION: A guide plate 5 is formed by bonding two plate members 51, 51 together. Recesses 52 and protrusions 53 are alternately formed on the bonding surface of the two plate members at regular pitch. These recesses 52 and protrusions 53 face the protrusions 53 and recesses 52 of the other plate member 51. The recess 52 has a square cross section in which the width T1 and the depth D1 are equal to each other. The width T2 of the protrusion 53 is equal to the width and depth of the recess 52. COPYRIGHT: (C)2011,JPO&INPIT
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