发明名称 |
METHOD FOR CORRECTING LAYOUT PATTERN |
摘要 |
A method for correcting layout pattern is disclosed. The method includes the steps of: providing a layout pattern having at least one segment; forming a rule-checking rectangle from the segment, wherein the rule-checking rectangle comprises at least one square; verifying whether the square of the rule-checking rectangle overlaps other layout pattern; removing the portion of other layout pattern overlapped by the square to obtain a corrected layout pattern; and outputting the corrected layout pattern to a mask.
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申请公布号 |
US2011029939(A1) |
申请公布日期 |
2011.02.03 |
申请号 |
US20090512034 |
申请日期 |
2009.07.30 |
申请人 |
YANG YU-SHIANG;HUANG CHUN-HSIEN |
发明人 |
YANG YU-SHIANG;HUANG CHUN-HSIEN |
分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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