| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a capacitive acceleration sensor capable of suppressing crack of a sealing structure for hermetically enclosing a movable part, and also avoiding decline of acceleration measurement accuracy. <P>SOLUTION: This sensor includes an acceleration sensor moving part and an acceleration sensor stationary part together forming a capacitor for detecting acceleration, the sealing structure hermetically enclosing the acceleration sensor moving part out of contact with the acceleration sensor moving part, and a support pillar enclosed by the acceleration sensor moving part but not directly contacted with the acceleration sensor moving part, both ends thereof being in contact with inside walls of the sealing structure. The acceleration sensor moving part is electrically connected to the support pillar. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
