发明名称 |
VERFAHREN ZUR HERSTELLUNG KRISTALLINER SILIZIUM-SO |
摘要 |
<p>The present invention provides a method of manufacturing a crystalline silicon solar cell, comprising:—providing a crystalline silicon substrate having a front side and a back side;—forming a thin silicon oxide film on at least one of the front and the back side by soaking the crystalline silicon substrate in a chemical solution;—forming a dielectric coating film on the thin silicon oxide film on at least one of the front and the back side. The thin silicon oxide film may be formed with a thickness of 0.5-10 nm. By forming a oxide layer using a chemical solution, it is possible to form a thin oxide film for surface passivation wherein the relatively low temperature avoids deterioration of the semiconductor layers.</p> |
申请公布号 |
DE602007011470(D1) |
申请公布日期 |
2011.02.03 |
申请号 |
DE20076011470T |
申请日期 |
2007.09.20 |
申请人 |
ECN ENERGIEONDERZOEK CENTRUM NEDERLAND |
发明人 |
KOMATSU, YUJI;GEERLIGS, LAMBERT JOHAN;MIHAILETCHI, VALENTIN DAN |
分类号 |
H01L31/18;H01L31/0216 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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