| 摘要 |
PROBLEM TO BE SOLVED: To provide a water substituting agent replacing isopropanol, etc., which has excellent vapor washing performance in a subsequent step, is excellent in safety, and is easily regenerated and used by distillation; and to provide a washing process including a water substituting step using the same. SOLUTION: The water substituting agent is used before vapor washing of the object to be washed. The vapor washing process includes a water substituting step using the same. The water substituting agent is represented by general formula (1): RO(C<SB>m</SB>H<SB>2m</SB>O)<SB>n</SB>H and includes a hydrophilic solvent having the following properties (A) and (B). In general formula (1), R is a 1-4C alkyl group, a carbon number m is a natural number of 2-5, and a repeating number n is a natural number of 1-2. (A) Water solubility at 20°C is≥50/100 g. (B) Boiling point is in the range from 120 to 220°C. COPYRIGHT: (C)2011,JPO&INPIT |
