| 摘要 |
PROBLEM TO BE SOLVED: To provide a dry chamber capable of keeping only a necessary part of a work area as an area of a prescribed low dew point, and further improving a degree of freedom in work inside thereof, and superior in the replacement performance of a manufacturing line. SOLUTION: The drying chamber is composed of a casing 20 having an opening 20a, a dry air supply piping system 14, a dry air recovery piping system 16, an upper flap 34 for opening and closing an upper side of the opening 20a, and a lower flap 38 for opening and closing a lower side of the opening 20a, the upper flap 34 is composed of a front plate 34a and a back plate 34b disposed at a back side of the front plate 34a at an interval, and dry air d supplied to a vent layer 34c formed between the front plate 34a and the back plate 34b flows down as an air curtain from a dry air supply opening 34e formed on a lower end face. COPYRIGHT: (C)2011,JPO&INPIT
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