| 摘要 |
An infrared detector (1) having a bolometer element (11) and a reference element (21) is provided with a bolometer thin film (22) supported on a surface of a substrate (10) while spaced apart from the surface of the substrate (10), a metal film (23) for heat dissipation formed on the substrate (10)-side surface of the bolometer thin film (22) through an insulating film (31), and a plurality of metal columns (25) connected thermally with the metal film (23) for heat dissipation and the substrate (10). Since heat generated from a light receiving portion (22a) by infrared rays is dissipated efficiently to the substrate (10) through the insulating film (31), the metal film (23) for heat dissipation, the metal columns (25), and a metal film (24) for heat dissipation on the side of the substrate, only temperature variation caused by variation in use environment can be measured accurately, and downsizing can be achieved while reducing the influence of temperature variation in use environment efficiently.
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