发明名称 |
METHOD FOR PRODUCING A MULTICOMPONENT, POLYMER- AND METAL-CONTAINING LAYER SYSTEM AND DEVICE |
摘要 |
<p>A method for producing layer systems on substrates includes irradiating a first vacuum coating source with an irradiating source. The first vacuum coating source includes a first layer material that is dissolved in a solvent. A second vacuum coating source is applied to the substrate via a chemical vapor deposition process. In this way, novel layer systems and mixed layers, in particular mixed layers of polymers and metals or metal oxides can be applied.</p> |
申请公布号 |
EP2279283(A1) |
申请公布日期 |
2011.02.02 |
申请号 |
EP20080716732 |
申请日期 |
2008.03.27 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
VERGOEHL, MICHAEL;NEUBERT, THOMAS |
分类号 |
C23C14/46;C23C14/06;C23C14/22;C23C14/28;C23C14/56 |
主分类号 |
C23C14/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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