发明名称 |
Load lock and method for transferring objects |
摘要 |
A load lock is constructed and arranged to transfer a substrate between a first environment and a second environment and to maintain each of the first environment and the second environment therein. The load lock includes a load lock chamber provided with at least two mutually distinct substrate supports positioned one above the other. Each of the substrate supports includes a substrate displacement element. The load lock also includes an evacuation device constructed and arranged to evacuate the load lock chamber, and a door constructed and arranged to close the load lock chamber during evacuation and for opening the load lock chamber.
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申请公布号 |
US7878755(B2) |
申请公布日期 |
2011.02.01 |
申请号 |
US20080068072 |
申请日期 |
2008.02.01 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
KLOMP ALBERT JAN HENDRIK;HOOGKAMP JAN FREDERIK;VUGTS JOSEPHUS CORNELIUS JOHANNES ANTONIUS;LIVESEY ROBERT GORDON;FRANSSEN JOHANNES HENDRIKUS GERTRUDIS |
分类号 |
B65G25/00;H01L21/677;G03F7/20;H01L21/027 |
主分类号 |
B65G25/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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