LASER ANNEALING APPARATUS HAVING AIR BEARING FOR TRANSFERRING SUBSTRATE

摘要

PURPOSE: A laser annealing apparatus is provided to prevent an afterimage of a wave shape on the surface of a substrate by stably transferring the substrate without a particle. CONSTITUTION: A laser annealing apparatus includes a reaction chamber(10), a laser radiating unit, and a substrate transferring unit. A first axis transfer stand(152) moves along a guide rail. The first axis transfer stand is installed to move along the bottom of the reaction chamber by an air bearing. A second axis transfer stand is installed to move along the bottom and the first transfer stand in a vertical direction to the moving direction of the first axis transfer stand. A rotary shaft guide is inserted into the center of the second axis transfer stand. A substrate support is installed on the rotary shaft guide.