TEST APPARATUS OF SEMICONDUCTOR DEVICE AND METHOD THEREOF

摘要

PURPOSE: A device and a method thereof are provided to accurately execute a positioning process by recognizing the location relation between a probe card and a backing material without recognizing the location of a probe tip. CONSTITUTION: A probe card recognition unit(2) recognizes the location of two probe card marks. A backing material recognition unit(3) recognizes the location of two backing material marks. A location relation recognition unit recognizes the location relation between a probe card and a backing material according to a probe card mark connection line and a backing material mark connection line. A correction unit corrects at least one location among the probe card and the backing material according to the location relation.