| 申请人 |
EBARA CORP., TOKIO/TOKYO, JP |
发明人 |
TAKEUCHI, NORIYUKI, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP;KAJIYAMA, MASAAKI, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP;KONDO, FUMIO, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP;MATSUMARA, MASAO, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP;YOSHIOKA, TAKESHI, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP |
