发明名称 CLAMP FOR INGOT SQUARING & GRINDING MACHINE
摘要 PURPOSE: A clamp for ingot squaring and a grinding machine are provided to improve the accuracy of production quality by adopting a clamping type supported from inner side and outer side in cramping. CONSTITUTION: A clamp body(10) has a concave spherical surface(13a). A clamp chuck(11) is rotatable in the concave spherical surface and has a spherical surface corresponding to the concave spherical surface, and it fixes the section of an ingot. The center of the chuck clamp contacting with the section of ingot is set at the center of the clamp. Even if the section of the ingot is inclined, the center of the ingot accords with the center of the clamp.
申请公布号 KR20110008390(A) 申请公布日期 2011.01.27
申请号 KR20090065723 申请日期 2009.07.20
申请人 HANMISEMICONDUCTOR CO., LTD. 发明人 JUNG, HYUN GYUN;NA, IK KYUN;PARK, JU HO
分类号 H01L21/687;H01L21/30;H01L21/304 主分类号 H01L21/687
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