| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine work tool capable of forming fine grooves or the like, whose width or depth is 100 μm or less, in a surface of a workpiece composed of a brittle material such as glass or ceramics, in fine working of a micro reaction system chip or the like; and a method of fine working the brittle material using the fine work tool.SOLUTION: A tip portion 4 formed in a tool body 1 is coated with a hard carbon coating 5. A film thickness t of the hard carbon coating 5 is greater than an outer diameter d at the front end of the tip portion 4. A cutting blade portion 6 whose surface is shaped like a substantially projected curved surface is formed at the front end of the tip portion 4 by the hard carbon coating 5. The fine work is applied on the surface of the workpiece composed of the brittle material by delivering the tool body 1 with the cutting blade portion 6 while rotating it around a central line O of the tip portion 4 by using such the fine work tool. |
