发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To achieve a high withstand voltage of a semiconductor device for driving a power device.SOLUTION: In this semiconductor device, an n-type impurity region 121 is formed in a main surface of a p-type substrate 200. A p-well 131 is formed in a main surface of the n-type impurity region 121. An n-type source region 133 of an nMOSFET and connected to a VS terminal is formed in the main surface of the p-well 131. A p-type source region 126 owned by a pMOSFET and connected to a VB terminal is formed in the main surface of the n-type impurity region 121. An n-embedding layer 31 is formed in a p-substrate 200 so as to contact the bottom surface of the n-type impurity region 121 while covering at least the lower part of the n-type source region 133. The n-embedding layer 31 has a second impurity concentration higher than the first impurity concentration of the n-type impurity region 121.
申请公布号 JP2011018929(A) 申请公布日期 2011.01.27
申请号 JP20100200415 申请日期 2010.09.08
申请人 MITSUBISHI ELECTRIC CORP 发明人 HATADE KAZUNARI
分类号 H01L27/092;H01L21/8234;H01L21/8238;H01L21/8249;H01L27/06;H01L27/08;H01L27/088;H01L29/06;H01L29/861 主分类号 H01L27/092
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