INSPECTION METHOD FOR SOLAR CELL WAFER USING SHADOW

摘要

PURPOSE: A wafer inspecting method for a solar cell using shadows is provided to detect the saw-mark of a wafer by radiating light to the wafer in order to form shadows based on the protrusion or recess of the saw-mark. CONSTITUTION: Light is radiated to a wafer for a solar cell(1). A protruded or recessed saw-mark(2) formed on the wafer for the solar cell. The saw-mark generates shadows(3) by the light. In a wafer inspecting process, the wafer for the solar cell is transferred. The saw-mark of the wafer is detected based on the shadows generated from the saw-mark regardless of the movement of the wafer for the solar cell.