POLYIMIDE BAKING OVEN

摘要

PURPOSE: A polyimide baking oven is provided to bake a polyimide uniformly even in a wafer having TPIX deviation by generating a deviation of a thermal distribution on a front of the wafer. CONSTITUTION: A polyimide baking oven is constituted with: a top heat plate(11) where a wafer is placed; a bottom heat plate(12) installed below the top heat plate; a heater holder(14) which applies heat to the bottom heat plate, being installed below the bottom heat plate; and a heater(13a,13b) which emits heat, being attached to the heater holder. The heater comprises a first heater and a second heater. A polyimide is baked by controlling the temperature in order for the temperature distribution to be nonuniform.