METHOD AND SYSTEM FOR PACKAGING MEMS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a MEMS-based display device.SOLUTION: The MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate attached to a back plate via a seal and the back plate can contain electronic circuitry for controlling the array of interferometric modulators. The back plate can be a physical support for device components (for example, electronic components etc.) which can be used to control the state of the display. The back plate can also be utilized as a primary structural support for the device.