SUBSTRATE HOLDING MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a substrate holding member having high rigidity in comparison with metal and does not cause a heat distortion to a substrate, and does not break like ceramic when impact is given. SOLUTION: A substrate holding member is composed of metal-ceramics composite material having a SiC powder content of 60-80 vol.% as a reinforcement and aluminum alloy of an Al-Si-Mg system in a matrix.