| 摘要 |
PURPOSE:To remove static electricity charged speedily with sureness by performing electrical connection between a static electricity removing ceramics of which surface resistance is in a specified range and a conductive member in a face contact or joint manner. CONSTITUTION:A static electricity removing member 1 is composed of a static electricity removing ceramics 4 of which surface resistance is in a range of 2X10<6> to 10<10>ohm/cm<2> and a conductor 7 connected to an earth 7, and the ceramics 4 and the conductive member 2 are face contacted or joined and connected electrically. The area of contact or joint is 1mm<2> or more, and preferably 2mm<2> or more. As the static electricity removing ceramics having such surface resistance a sintered body is used in which one or more kind of conductive compound selected out of nitride or carbide of Ti, Zr, Hf, Nb or Ta is included in a matrix having a main component of alumina and of which relative concentration is 90% or more. |
