| 摘要 |
PROBLEM TO BE SOLVED: To quickly set an imaging means to the optimum focal position of an object to be measured by an automatic focusing apparatus having a simple structure. SOLUTION: The automatic focusing apparatus 1 is provided with the 1st imaging means 9A for photographing the object to be measured 7 through an objective lens 8A placed facing the object 7, the 2nd imaging means 9B which is arranged with leaving a fixed distanceαfrom the 1st imaging means 9A in a focusing direction, for photographing the object to be measured, a pattern projecting means 3 for projecting a prescribed pattern on the surface of the object 7, half mirrors (optical system) 11 and 12 for guiding the light reflected by the object 7 to be measured to the 1st imaging means and the 2nd imaging means through the objective lens 8A, a control means 6 for obtaining the distribution of data on the brightness of the object 7 based on the image data of the imaging means 9A and the imaging means 9B, and a shifting means 5A which is driven under instructions of the control means so as to shift the objective lens 8A in the focusing direction. COPYRIGHT: (C)2006,JPO&NCIPI |
