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发明名称
REFERENCE MATERIAL OF SPATIAL RESOLUTION FOR 2-DIMENSIONAL DOPANT IMAGING
摘要
申请公布号
KR101008656(B1)
申请公布日期
2011.01.25
申请号
KR20080047542
申请日期
2008.05.22
申请人
发明人
分类号
H01J37/26;G01N23/22
主分类号
H01J37/26
代理机构
代理人
主权项
地址
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