发明名称 METHOD FOR PRODUCING MAGNETORESISTIVE EFFECT ELEMENT, MAGNETIC SENSOR, ROTATION-ANGLE DETECTION DEVICE
摘要 Disclosed is a method which can regulate the orientation and the directionality of the magnetization of a fixed ferromagnetic layer while reducing the number of steps to form a GMR layer. The magnetic orientation of the fixed ferromagnetic layer is regulated in a plurality of directions by means of forming a plurality of patterns that have directionality. Furthermore, when a magnetoresistive effect layer is formed, a magnetic field is applied at an angle set between the angles formed by the aforementioned plurality of patterns.
申请公布号 WO2011007767(A1) 申请公布日期 2011.01.20
申请号 WO2010JP61806 申请日期 2010.07.13
申请人 HITACHI METALS, LTD.;MEGURO KENICHI;HOSHIYA HIROYUKI;KATOU KEIZOU;ABE YASUNORI 发明人 MEGURO KENICHI;HOSHIYA HIROYUKI;KATOU KEIZOU;ABE YASUNORI
分类号 G01R33/09;G01D5/245;H01L43/08;H01L43/12 主分类号 G01R33/09
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