METHOD FOR CLEANING FINGER OF WAFER TRANSFERING ROBOT AND CLEANER MODULE FOR THE SAME

摘要

PURPOSE: A wafer transferring robot finger cleaning method and a cleaner module thereof is provided to omit the cleaning device for cleaning the finger of a robot by loading the cleaner module in FOUP(Finger Cleaner module) and cleaning it. CONSTITUTION: A host periodically checks the preventive maintenance schedule(S101). The equipment requests the FOUP in which the cleaner module of a finger is inserted to an AMHS(Automatic Material Handling System)(S102). An automatic handling system loads the FOUP in which the cleaner module is inserted in the equipment(S103).