发明名称 METHOD OF MANUFACTURING OPTICAL WAVEGUIDE DEVICE
摘要 An optical waveguide device is provided which is capable of reducing light propagation losses in the cores of an optical waveguide when the optical waveguide is formed on a surface of a substrate, regardless of the type of substrate. A photosensitive resin layer (4A) for over cladding layer formation is made of a photosensitive resin composition of a non-solvent type, and is heated prior to the exposure thereof to light. This causes interface portions between the cores (3) and the photosensitive resin layer (4A) to be formed into mixed layers (5). This reduces light propagation losses.
申请公布号 US2011014575(A1) 申请公布日期 2011.01.20
申请号 US20100834253 申请日期 2010.07.12
申请人 NITTO DENKO CORPORATION 发明人 HIKITA TAKAMI;FUJISAWA JUNICHI
分类号 G03F7/20 主分类号 G03F7/20
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