| 摘要 |
Provided are a three-dimensional directional drift control device and microscope device that rapidly and reliably correct relative misalignment between an objective lens and a specimen. In the provided three-dimensional directional drift control device, which can be applied to a microscope, the surface of a glass cover, which holds the specimen (12) on a stage (21), is illuminated by near-infrared light emitted from a light source (30). Part of the near-infrared light is blocked by a knife edge (34). Illumination of the glass cover by the near-infrared light gives rise to near-infrared specularly-reflected light and scattered light, which are then incident upon a half mirror (33) via either an objective lens (22) or an offset lens group (35). The specularly-reflected light reflected by the half mirror (33) is blocked by the knife edge (34). On the basis of an image of the scattered light reflected by the half mirror (33) into a two-dimensional photoelectric converter (39), a clamp processing unit (41) detects horizontal misalignment of the projection of the specimen (12) onto the objective lens (22). In accordance with the detection result, the clamp processing unit controls a drive unit (42) to move the stage (21). |
