| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device and an air flow control plate capable of preventing a coating liquid from turning to the back surface side of a substrate and being stuck without using a complicated configuration.SOLUTION: The upper plate 11 of the air flow control plate 10 is disposed with a gap 33 from the peripheral edge of the substrate W held by a holding head 1. Since the lower surface 11b of the upper plate 11 is abutted on the upper surface of a guide blade 18 provided on the lower plate 12 of the air flow control plate 10, the upper plate 11 and the lower plate 12 are integrally fixed, and thus the air flow control plate 10 is configured. In the air flow control plate 10 of a rotating air flow control unit 5, air is introduced from an introducing port 13, and the introduced air mainly flows in a side direction flow path 16 and also flows in a radial flow path 17. In particular, a resist liquid 31 turning to the lower surface 11b of the upper plate 11 through the gap 33 is discharged from a discharge port 15 by a centrifugal force and the air flowing through the radial flow path 17 while being stuck to the lower surface 11b by surface tension. |
