发明名称 |
METHOD FOR MANUFACTURING DIFFRACTIVE OPTICAL ELEMENT |
摘要 |
There is provided a method for manufacturing a diffractive optical element that can suppress the generation of heat from the inside of an insulative substrate and stabilize an etching rate. A method for manufacturing a diffractive optical element composed of an insulative substrate whose surface has a bumpy structure includes a selecting step of selecting an insulative substrate having an electrical resistivity equal to or higher than a certain value by measuring electrical resistivity of insulative substrates; and an etching step of forming a bumpy structure by dry etching in a surface of the insulative substrate selected in the selecting step.
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申请公布号 |
US2011011831(A1) |
申请公布日期 |
2011.01.20 |
申请号 |
US20090922647 |
申请日期 |
2009.11.13 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD.;SUMITOMO ELECTRIC HARDMETAL CORP. |
发明人 |
KURISU KENICHI;IMAMURA HIDEAKI |
分类号 |
C23F1/00 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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