| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device for optimally controlling a brake mechanism to prevent the position deviation of a stage from being generated, even if the servo control of a motor is stopped, after the stage is positioned and the stage positioning control method of the device.SOLUTION: The stage device is provided with the brake mechanism which is driven by a pizeo element 632. When a stage is positioned for the first time at each point where it should be positioned, the stage is moved and stopped; and a brake driving command is adjusted so that a thrust command to a linear motor 622 can approach 0 by a brake control optimization means 640, and the optimal brake driving command to prevent the position deviation of the stage from being generated, even if the servo control of the linear motor 622 is turned off is searched, and stored in a brake control parameter storage means 641. Furthermore, when the stage is positioaned again, at a point where it should be positioned, the stage is moved and stopped; and the stored optimal brake driving command is output to a braking mechanism. Thus, high-accuracy positioning becomes possible. |
