The present invention generally relates to apparatus and method for recycling both polishing slurry and rinse water from CMP processes. The present invention also relates to rheology measurements and agglomeration prevention using centrifugal pumps.
申请公布号
WO2010111291(A3)
申请公布日期
2011.01.20
申请号
WO2010US28346
申请日期
2010.03.23
申请人
APPLIED MATERIALS, INC.;NEUBER, ANDREAS;CHANDLER, PHIL;STOW, CLIFF;CLARK, DANIEL O.;KIEFER, MICHAEL;LEIGHTON, JAMIE
发明人
NEUBER, ANDREAS;CHANDLER, PHIL;STOW, CLIFF;CLARK, DANIEL O.;KIEFER, MICHAEL;LEIGHTON, JAMIE
