发明名称 FILM-FORMING METHOD AND FILM-FORMING APPARATUS
摘要 A film forming method in which crystalline film having PZT (001) or PZT (100) as a principal component thereof is laminated on a foundation film having a (111) oriented noble metal as a principal component thereof, the method including the steps of: performing reduction treatment on a surface of the foundation film; and forming the crystalline film by an MOCVD method on the surface of the foundation film.
申请公布号 EP2053643(A4) 申请公布日期 2011.01.19
申请号 EP20070791669 申请日期 2007.07.31
申请人 ULVAC, INC. 发明人 MASUDA, TAKESHI;KAJINUMA, MASAHIKO;NISHIOKA, YUTAKA;KIMURA, ISAO;KIKUCHI, SHIN;YAMADA, TAKAKAZU;SUU, KOUKOU
分类号 H01L21/316 主分类号 H01L21/316
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