| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid immersion lens holder capable of improving adhesion between a solid immersion lens and an observation object. SOLUTION: The solid immersion lens holder 200 includes: a holder body 8 having a lens holding part 60 for holding the solid immersion lens 6; and an objective lens socket 9 for attaching the holder body 8 to the front end of the objective lens 21. The solid immersion lens 6 is freely held by the lens holding part 60, not fixed to the lens holding part 60. A vibration generating part 120 for vibrating the holder body 8 is attached to the objective lens socket 9. The vibration generating part 120 includes a vibrating motor 140 held by a motor holding member 130. A weight 142 having a structure biased in weight is attached to the output shaft 141 of the vibrating motor 140. The vibration generated by the vibration generating part 120 is transmitted to the solid immersion lens 6 through the objective lens socket 9 and the holder body 8. COPYRIGHT: (C)2009,JPO&INPIT
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