摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method of inspecting a device capable of quickly reading recorded inspection results. SOLUTION: A first recording means 14 writes the inspection results for 32 pins in a fail memory 15 according to determination results of a determination part 13. Then, whether or not a fail is present in the written inspection results is determined, and if the determination is affirmative, a second recording means 16 writes an address of the fail memory 15 in which the inspection results are written into a predetermined address in a fail address memory 17. COPYRIGHT: (C)2009,JPO&INPIT
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