发明名称 Vacuum vapor deposition apparatus
摘要 <p>Provided is a vacuum vapor deposition apparatus in which a crucible (3) as a container for vaporizing a vapor deposition material (2) is placed inside a vacuum chamber (1) and a film is formed on a substrate (4) by use of the vapor deposition material (2) vaporized in the crucible (3). The apparatus includes measuring means for measuring a bulk of the vapor deposition material (2) in the crucible (3) from an outside of the vacuum chamber (1).</p>
申请公布号 EP2275588(A1) 申请公布日期 2011.01.19
申请号 EP20100167321 申请日期 2010.06.25
申请人 MITSUBISHI HEAVY INDUSTRIES, LTD. 发明人 HIRANO, TATSUYA;YANAGI, YUJI;SHIGEOKA, NOBUYUKI
分类号 C23C14/54 主分类号 C23C14/54
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